gateworkfunction

2007年12月24日—相對於此，以往提出的「dualmetal」就難以導入gate初級製程中。因為在dualmetal中，分別使用nMOS和pMOS兩種workfunction相異的metalgate材料來控制 ...,2016年11月27日—Workfunctionofthegatedependsonwhatmetalisusedfor.Metalcanbelowerorhigherthanhighly-dopedpoly(eithern+orp+).work ...,2023年4月5日—Theworkfunctionofagatereferstotheamountofenergyrequiredtoremoveanelectronfromthegatematerialand...

參考資訊如下
32奈米以下IC半導體性能提昇的重要推手

2007年12月24日 — 相對於此，以往提出的「dual metal」就難以導入gate初級製程中。因為在dual metal中，分別使用nMOS和pMOS兩種work function相異的metal gate材料來控制 ...

Can somebody explain in details how metal gate work ...

2016年11月27日 — Work function of the gate depends on what metal is used for. Metal can be lower or higher than highly-doped poly (either n+ or p+). work ...

Define workfunction of gate?

2023年4月5日 — The work function of a gate refers to the amount of energy required to remove an electron from the gate material and move it to the vacuum ...

Dual work function metal gate CMOS technology using ...

由 I Polishchuk 著作 · 2001 · 被引用 203 次 — This new technology is demonstrated for the Ti–Ni metal combination that produces gate electrodes with 3.9 eV and 5.3 eV work functions for n-MOS and p-MOS ...

Metal Gate Work Function Engineering: Sub

由 MR Hasan 著作 · 2019 · 被引用 8 次 — Abstract: The effect of metal gate (MG) work function (WF) on MOSFETs having double gate has been researched for the next generation logic applications.

Metal gate work function modulation mechanisms for 20

由 B Saidi 著作 · 2014 · 被引用 6 次 — My thesis work aims to give to STMicroelectronics the key parameters that enable the control of the gate electrode effective work function and ...

Understanding the Origin of Metal Gate Work Function Shift ...

由 S Ramesh 著作 · 2021 · 被引用 2 次 — We studied the metal gate work function of different metal electrode and high-k dielectric combinations by monitoring the flat band voltage ...

Work Function Control on High K Metal Gate Stacks

由 J Robertson 著作 · 2009 · 被引用 5 次 — On the other hand, the metal gate materials must have a work function energy close to the Si conduction or valence ... work function of the gate stack combination ...

Work Function Setting in High

由 E Erben 著作 · 2018 · 被引用 8 次 — The metal gate for NMOS transistors requires a work function close to the conduction band of Si (∼4.1 eV) and the PMOS transistor needs a metal gate with a ...